Surface activated bonding of aluminum oxide films at room temperature
نویسندگان
چکیده
We have investigated the surface activated bonding (SAB) of deposited Al2O3 films by chemical vapor deposition under a short-time condition at room temperature. Although energy for was very low, that film/sapphire approximately 1 J m − 2 and more than sapphire/sapphire bonding. Transmission electron microscopy showed an amorphous-like intermediate layer nm thick, observed interface Al2O3/Al2O3, but not in Al2O3/sapphire, which suggests crystallinity film affects Al2O3.
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ژورنال
عنوان ژورنال: Scripta Materialia
سال: 2021
ISSN: ['1359-6462', '1872-8456']
DOI: https://doi.org/10.1016/j.scriptamat.2020.09.005